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Трехкомпонентная модель эффективной среды для определения состава слоев на кремниевых пластинах
Стаськов, Н. И.
;
Сотская, Л. И.
(
2017
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Сотская, Л. И. (1)
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effective medium model (1)
multi-angle ellipsometry (1)
oxidation of silicon wafers (1)
substrate layer (1)
transition layers (1)
многоугловая эллипсометрия (1)
модель эффективной среды (1)
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