Аннотации:
Рассматриваются вопросы описания движения потока микрочастиц в плазмогенераторе тлеющего разряда. В тлеющем разряде формирование потоков заряженных частиц имеет вероятностный характер, поэтому наиболее целесообразно применение уравнения Шрёдингера для оценки данных явлений. Получены аналитические зависимости для определения энергии заряженных частиц, участвующих во взаимодействии с обрабатываемым изделием. При формировании потока заряженных частиц учитывается их масса и закон распределения количества частиц в зависимости от массы. The work purpose is development of the theory ensuring creation of an efficient system of fast process control in the plasma generator of a glow discharge and contributing to the development of new techniques and equipment for their realization under conditions of controllable automated tool production. There are used regulations of quantum mechanics lying in that any system can be described by setting in a general case a complex wave function of the kind of t,r . A possibility to find out a charged particle at the time t in some point of the near-cathode area of the closed volume of the plasma generator with the radius-vector r was defined by probability density which is presented by a module square of the wave function of 2 t,r . In the course of the investigation carried out there are obtained the following results. The formation of charged particle flows in the plasma generator of a glow discharge has a probabilistic character. The Schroedinger equation use to obtain analytical dependences describing the processes of charged particle flows formation in the plasma generator of a glow charge is the most corresponding as it allows defining a value of their energy depending on the gas technologi
cal environment used. The rate change of gas technological environment pumping allows forming a corresponding volume of ions having specified energy and frequency, in the flow taking into account their mass and energy according to the adopted exponential distribution of ion mass in the flow. In automated technological environment having changed a kind of gas technological environment and a rate of its pumping it is possible to obtain predictable results of the impact of glow discharge plasma upon a surface of products worked explaining the effect of defect generation. As a result of high-energy ion bombardment of the surface of products under processing in the plasma generator of the glow discharge there is discovered the presence of a dissipative process with the elements of self-organization. The low-energy ion presence in the flow ensures an ion current transfer which results in the change of chemical and phase structure in the surface volume of material, its modification and reduction of a crystalline structure and also in amorphism on the surface.
